Synthesis of Crack-Free PZT thin Films by Sol-gel Processing on Glass Substrate
نویسندگان
چکیده
منابع مشابه
Processing Sol-gel Pzt Thin Films for Microactuators
Sol-gel derived lead zirconate titanate (PZT) thin films are being investigated for micromechanical applications. A synthesis technique which involves the spin coating of several thin layers followed by rapid thermal annealing to crystallize the perovskite phase and repetition to achieve thicker films is described. Methods of improving the PZT-PZT interfaces between subsequently annealed layers...
متن کاملSynthesis of PZT thin films by sol - gel process and its characterization
Ferroe lectri c Pb(Zr,Ti)O, (PZT) thin films ha ve been fa bri cated by the alkoxide based so l-ge l method. PZT stoc k so lutions ha ve been spin coated on glass. sili con and metalli sed sil ico n substrate. The coating is repeated until 0.6 ~lIn thick ness of film has been deposited on various substrates. PZT thin films have been an ne led at vari ous temperatures and characte rized by X-ray...
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Nanocrystalline ZnO thin films have been fabricated by a multi-step sol-gel method using spin coating technique. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used as a starting material, solvent and stabilizer, respectively. X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) were employed to characterize structure and morphologies of the as-deposited samples. T...
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ژورنال
عنوان ژورنال: Procedia Materials Science
سال: 2015
ISSN: 2211-8128
DOI: 10.1016/j.mspro.2015.11.136